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Extended NIR Camera

The PE100 Emission Microscope is a specialized failure analysis instrument designed to detect weak photon emissions resulting from various chip-level defects.

When paired with a probe station, it enables precise failure localization on decapped devices, bare dies, and wafers.

Additionally, the PE100 can be equipped with a proprietary lens-based thermal imaging system to identify abnormal hotspots on the chip surface.
 

​InGaAs Camera  

Equipped with a near‑infrared (NIR) light source, the InGaAs sensor enables precise detection of emissions directly from the backside of the die.

Operating across a broad 900 to 1700 nm spectral range, it delivers excellent sensitivity and performance for advanced analysis.

The system features Peltier cooling for stable, reliable operation, along with a large effective sensitive area of 636 × 508 pixels.

With a 25 × 25 µm pixel size, it provides high‑resolution imaging that captures fine details with confidence and clarity.