FAILURE ANALYSIS
MultiProbe
Multiscan Atomic Force (AFP) combines the lowest noise electrical probing with atomic force microscopy,
resulting in world's highest resolution probing tool.
The Atomic Force Probe (AFP) is an ideal tool for imaging and contacting deep submicron structures.
The sharp probes, nano-positioning using piezo electrics, and force feedback provide the user with a nanometer resolution map of surface structures
and the ability to place the probes on the desired nodes very quickly with controlled contact force.
The AFP is designed to use ultra-sharp tungsten needles to give the probes a tremendously long lifetime for both imaging and probing.
The Multiprobe AFP's real value is the ability to extract propertises at every possible stage of the process from silicide to final metalization.
What once took a weeks worth of additional process steps is shortened to the time it takes to pull a wafer at contact or silicide level.
How valuable would it be to measure propertises one month, one week or even one day sooner.
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Trion Technology
Suss MicroTec
Left Coast Instruments
New Wave Research
Nikon
Wire Pull, Ball Shear, Die
Shear and Ball Pull tester
- User-friendly control : Joystick, X, Y & Z tables motion, max 100mm
- Improved accuracy with zero backlash
- Pre-positioning check vacuum hold down (Vacuum work holder)
- Simplified operation manual
- Modular software
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